BS EN ISO 14644-3:2005,Cleanrooms And Associated Controlled Environments – Test Methods.
ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.
Cleanrooms and associated controlled environments provide for the control of airborne contamination to levels appropriate for accomplishing contamination-sensitive activities. Products and processes that benefit from the control of airborne contamination include those in such industries as aerospace, microelectronics pharmaceuticals, medical devices, healthcare and food.
This part of ISO 14644 sets out test methods that may be used for the purpose of characterizing a cleanroom as described and specified in other parts of ISO 14644.
Statements in this part of ISO 14644 reference the standards of ASTM, CEn, DIN, IEST, JACA, JIS and SEMI.
An airborne particle count test (see Table 1) shall be carried out in order to classify an installation in accordance with ISO 14644-1, at the time intervals specified in Iso 14644-2.